JPH0330819U - - Google Patents

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Publication number
JPH0330819U
JPH0330819U JP9111289U JP9111289U JPH0330819U JP H0330819 U JPH0330819 U JP H0330819U JP 9111289 U JP9111289 U JP 9111289U JP 9111289 U JP9111289 U JP 9111289U JP H0330819 U JPH0330819 U JP H0330819U
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Japan
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP9111289U
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English (en)
Japanese (ja)
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JPH073288Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to JP9111289U priority Critical patent/JPH073288Y2/ja
Publication of JPH0330819U publication Critical patent/JPH0330819U/ja
Application granted granted Critical
Publication of JPH073288Y2 publication Critical patent/JPH073288Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP9111289U 1989-08-02 1989-08-02 光学式変位検出器 Expired - Fee Related JPH073288Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9111289U JPH073288Y2 (ja) 1989-08-02 1989-08-02 光学式変位検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9111289U JPH073288Y2 (ja) 1989-08-02 1989-08-02 光学式変位検出器

Publications (2)

Publication Number Publication Date
JPH0330819U true JPH0330819U (en]) 1991-03-26
JPH073288Y2 JPH073288Y2 (ja) 1995-01-30

Family

ID=31640612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9111289U Expired - Fee Related JPH073288Y2 (ja) 1989-08-02 1989-08-02 光学式変位検出器

Country Status (1)

Country Link
JP (1) JPH073288Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013027805A1 (ja) * 2011-08-23 2013-02-28 株式会社ニコン エンコーダ装置、及び装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013027805A1 (ja) * 2011-08-23 2013-02-28 株式会社ニコン エンコーダ装置、及び装置
JPWO2013027805A1 (ja) * 2011-08-23 2015-03-19 株式会社ニコン エンコーダ装置、及び装置

Also Published As

Publication number Publication date
JPH073288Y2 (ja) 1995-01-30

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Legal Events

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